Conference paper
Application of atomic-force microscopy to phase-shift masks
A.P. Ghosh, D.B. Dove, et al.
Microlithography 1992
A new technique is described whereby one can extract the nonlinear photothermal properties of a sample in photothermal microscopy. The basic scheme relies on chopping a pump heating beam at ω and detecting the temperature variation of the sample using a linear temperature sensor (in our case a mirage detector) tuned to 2ω. Harmonic images of cracks and other samples show very high contrast when compared with the fundamental image.
A.P. Ghosh, D.B. Dove, et al.
Microlithography 1992
David W. Abraham, T.J. Chainer, et al.
IEEE Transactions on Magnetics
M. Nonnenmacher, M. Vaez-Iravani, et al.
Review of Scientific Instruments
Y. Martin, C.C. Williams, et al.
Journal of Applied Physics