Extendibility of Cu damascene to 0.1 μm wide interconnections
C.-K. Hu, K.Y. Lee, et al.
MRS Spring Meeting 1998
We have fabricated quantum devices from remotely doped Si/SiGe heterostructures. The devices are interferometers (loops) similar in plan to those used in experiments on ballistic GaAs/AlxGa1-xAs devices. The loops are approximately 2r=0.8 μm in diameter with linewidths of w=0.4 μm. We have observed clear Aharonov-Bohm (AB) oscillations that vanish systematically as the carrier temperature increases. Response of up to the second harmonic of the fundamental AB frequency e/h implies a phase coherence length of around L=1.2 μm. In some samples, we see steps in conductance G(Vg) as a function of gate voltage similar to the ballistic mode steps seen in GaAs/AlxGa1-xAs point contacts. © 1994 American Institute of Physics.
C.-K. Hu, K.Y. Lee, et al.
MRS Spring Meeting 1998
J. Liu, W.X. Gao, et al.
Journal of Low Temperature Physics
T.M. Shaw, C.-K. Hu, et al.
MRS Spring Meeting 1996
C.-K. Hu, K.Y. Lee, et al.
Thin Solid Films