Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
No abstract available.
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
L Auslander, E Feig, et al.
Advances in Applied Mathematics
Renu Tewari, Richard P. King, et al.
IS&T/SPIE Electronic Imaging 1996