Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
The potential of using various classes of MDS array codes as LDPC codes is examined. These codes include the BR code, a modified EVENODD code, and the X-code. The algebraic structures of the array codes can enable more efficient encoding and decoding in terms of memory space and computation time. Experimental results show iterative decoding of these array codes provides comparable or slightly better error correction performance than a regular LDPC code with similar parameters. In addition, these codes can be decoded as array codes.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
A. Grill, B.S. Meyerson, et al.
Proceedings of SPIE 1989
M. Tismenetsky
International Journal of Computer Mathematics