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Modeling polarization for Hyper-NA lithography tools and masks
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It is proved that, under the usual restrictions, the denominator of the integral of a purely logarithmic function is the expected one, that is, all factors of the denominator of the integrand have their multiplicity decreased by one. Furthermore, it is determined which new logarithms may appear in the integration. © 1985, ACM. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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ISIT 2003