Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
Recently there were considerable interest in fabricating sub-micrometer and nanometer-scale structures. The ability to pattern surfaces with regularly sized and spaced features on the nanoscopic level was desirable for many potential applications. Thus, block copolymers offer an attractive route to overcome some of the limitation of conventional lithographic techniques, since they self-assemble into a variety of ordered morphologies on the length scale of tens of nanometers.
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
Frank Stem
C R C Critical Reviews in Solid State Sciences
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989