Ehud Altman, Kenneth R. Brown, et al.
PRX Quantum
Ehud Altman, Kenneth R. Brown, et al.
PRX Quantum
Daniel J. Costello Jr., Pierre R. Chevillat, et al.
ISIT 1997
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009