PaperAuger and ellipsometric study of phosphorus segregation in oxidized degenerate siliconN.J. Chou, Y.J. Van Der Meulen, et al.Japanese Journal of Applied Physics
PaperEffects of Material and Processing Parameters on the Dielectric Strength of Thermally Grown Si02 FilmsN.J. Chou, J.M. EldridgeJES
PaperAdhesion of titanium thin film to oxide substratesY.H. Kim, Y.S. Chaug, et al.Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperApplication of Triangular Voltage Sweep Method to Mobile Charge Studies in MOS StructuresN.J. ChouJES