Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A unified interpretation is given for the infrared and optical spectra of many TCNQ compounds which exhibit a wide variety of physical properties. Inter- and intra-molecular transitions are distinguished by polarization measurements on single crystals of several TCNQ salts. It is suggested that there is incomplete charge transfers in both tetrathiofulvalinium (TTF)- and N-methylphenazinium (NMP)-TCNQ and that the electron-electron interactions are not appreciably screened by the excitonic polarizability of the cations. © 1993.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
O.F. Schirmer, K.W. Blazey, et al.
Physical Review B