Critical alignments in plane mirror interferometry
N. Bobroff
Microlithography 1992
Non-linearity of the two-frequency Michelson interferometer is studied by measurement of the modulation in phase and amplitude of the interference signal at the receiver. An important conclusion is that frequency mixing is not a major cause of non-linearity unless the mixing is asymmetric between the two arms of the interferometer. One source of asymmetry is non-orthogonality of the frequency states produced by the laser. Differential transmission between the reference and measurement paths can cause polarization states that are initially orthogonal to become non-orthogonal at the interferometer output. The influence of beam-splitter leakage, misorientation of the polarization axes of the source, and imperfect waveplates are also considered. It is not widely known that typical retroreflectors cause about a 7° rotation of the polarization state. However, polarization mixing induced by the retroreflectors is small in most, but not all, common configurations of the interferometer. © 1990.
N. Bobroff
Microlithography 1992
Robert L. Melcher, P.M. Alt, et al.
IBM J. Res. Dev
A. Kochut, N. Bobroff, et al.
NOMS 2004
E.G. Colgan, F.E. Doany, et al.
Journal of the Society for Information Display