Beomseok Nam, Henrique Andrade, et al.
ACM/IEEE SC 2006
Paper
High-numerical-aperture optical designs
Abstract
This paper is an overview of the designs of high-numerical-aperture lenses for optical projection lithography at the IBM Thomas J. Watson Research Center.
Related
Thomas R. Puzak, A. Hartstein, et al.
CF 2007
Rajiv Ramaswami, Kumar N. Sivarajan
IEEE/ACM Transactions on Networking
Conference paper
QALD-3: Multilingual question answering over linked data
Elena Cabrio, Philipp Cimiano, et al.
CLEF 2013