Hiroshi Ito, Reinhold Schwalm
JES
No abstract available.
Hiroshi Ito, Reinhold Schwalm
JES
Revanth Kodoru, Atanu Saha, et al.
arXiv
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures