Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The progressive reduction of SrTiO3 has been monitored by EPR. The results show the conversion of Mn4+ to Mn2+ and Mn2+ to Mn2+-V0 by oxygen-vacancy capture. The latter defect association takes place with the copious oxygen vacancies produced during high-temperature reduction between 1100 - 1300 K. At still higher reduction temperatures, other defects are formed. Analysis of the temperature dependence of the defect association gives a value of 0.7 eV for the enthalpy of association. © 1983.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
Thomas E. Karis, C. Mark Seymour, et al.
Rheologica Acta
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999