Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We propose a simple algorithm for the pair distribution functions, gg, for binary hard‐sphere mixtures. This extends Verlet and Weis's method of improving the py g(r) for pure hard‐sphere fluids. The resulting functions are pressure‐consistent and yield virtually the correct equation of state. Copyright © 1972 John Wiley & Sons, Inc.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
K.A. Chao
Physical Review B