John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
A universal method for representing solutions of the initial value problem ut = −2πiDu is presented for a large class of pseudo‐differential operators. The representations take the form of a path integral‐like operator. Three numerical approaches for evaluating these operators are treated. Practical interest in such universal methods depends on massively parallel computing systems. Copyright © 1990 Wiley Periodicals, Inc.
John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
J.P. Locquet, J. Perret, et al.
SPIE Optical Science, Engineering, and Instrumentation 1998
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
T. Graham, A. Afzali, et al.
Microlithography 2000