Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Alexander and Orbach have recently proposed that the ratio of the fractal dimensionality of the incipient infinite cluster in percolation to the fractual dimensionality of a random walk on the cluster is, independent of the spatial dimensionality of the system. As a consequence, they predict that the electrical conductivity exponent t =0.9479 in two dimensions, where is the correlation-length exponent. Our numerical data, which are obtained from large-lattice finite-size scaling calculations, give a value t =0.973-0.003+0.005, in disagreement with the conjecture by 2.6%. © 1984 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Imran Nasim, Melanie Weber
SCML 2024
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Robert W. Keyes
Physical Review B