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Modeling polarization for Hyper-NA lithography tools and masks
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In a GaAs/AlGaAs 4-coupled-ring sample, large Aharonov-Bohm (AB) oscillations were studied up to harmonic order n = 8 for magnetic fields 0 < B < 4.5T. The frequencies of all harmonics of the AB oscillations decrease as predicted by a simple model. The results also suggest an increase of the quantum mechanical phase coherence length (lφ) with increased B. © 1994 Plenum Publishing Corporation.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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