E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
The creation of surface-selective copper patterns was explored via the photochemical decomposition of dimethyl (1,3-diphenyl-l,3-propanedionato) gold. UV irradiation of a substrate treated with the gold complex results in the formation of elemental gold, which in turn catalyzes copper metal plating from an electroless bath. Thus, a selective copper pattern can be formed in a simplified process as defined by patterned UV irradiation. The variables which are important to the process are discussed including the UV dose, wavelength, and the surface concentration of gold complex. © 1990, The Electrochemical Society, Inc. All rights reserved.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
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Surface Science
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SPIE Advanced Lithography 2007