Conference paper
Sub-halfmicron negative resist systems by image reversal
K. Chiong, H. Hiraoka
Proceedings of SPIE 1989
No abstract available.
K. Chiong, H. Hiraoka
Proceedings of SPIE 1989
J. Krishnaswamy, Mark Eyolfson, et al.
Proceedings of SPIE 1989
H. Hiraoka
J. Photopolym. Sci. Tech.
H. Hiraoka, J. Duran
Microlithography 1986