PaperAll Dry Lithography Processes and Mechanistic Studies with Poly(methacrylonitrile) and Related PolymersH. HiraokaJES
Conference paperDEEP UV PHOTOLITHOGRAPHY WITH COMPOSITE PHOTORESISTS MADE OF POLY(OLEFIN SULFONES).H. Hiraoka, L.W. Welsh Jr.ACS National Meeting 1983
PaperExperimental observations of the negative atomic nitrogen ionH. Hiraoka, R.K. Nesbet, et al.Physical Review Letters
PaperSoft vacuum, pulsed electron-beam hardening of lithographic polymersJ. Krishnaswamy, L. Li, et al.Journal of Materials Research