PaperExperimental observations of the negative atomic nitrogen ionH. Hiraoka, R.K. Nesbet, et al.Physical Review Letters
PaperAll Dry Lithography Processes and Mechanistic Studies with Poly(methacrylonitrile) and Related PolymersH. HiraokaJES
Conference paperAqueous developable, negative working resist made of chlorinated novolac resinH. Hiraoka, A.M. Patlach, et al.Proceedings of SPIE 1989
Conference paperEnhancement of RIE resistance of conventional resist materialsH. HiraokaProceedings of SPIE 1989