Conference paperA simple metal pn polymer process using pulsed electron beams in soft vacuumJ. Krishnaswamy, Mark Eyolfson, et al.Proceedings of SPIE 1989
PaperAll Dry Lithography Processes and Mechanistic Studies with Poly(methacrylonitrile) and Related PolymersH. HiraokaJES
Conference paperSoft vacuum pulsed electron beam processing of teflon and teflon-like filmsJ. Krishnaswamy, G.J. Collins, et al.Proceedings of SPIE 1989
PaperContrast Enhancement and Resist Wall Profile Control by Surface CrosslinkageH. HiraokaJ. Photopolym. Sci. Tech.
