Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
By placing a photon detector near the tip-sample region of a scanning tunneling microscope, we have measured isochromat photon-emission spectra of polycrystalline tantalum and Si(111)7×7 at photon energies of 9.5 eV. Such spectra contain electronic-structure information comparable to inverse photoemission spectroscopy, but with high lateral/spatial resolution. The implications of this new observation are discussed. © 1988 Springer-Verlag.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
E. Burstein
Ferroelectrics