H.F. Winters, J.W. Coburn
Applied Physics Letters
No abstract available.
H.F. Winters, J.W. Coburn
Applied Physics Letters
J.W. Coburn, K. Koehler
Symposium on Plasma Processing 1986
J.W. Coburn, E. Taglauer, et al.
Journal of Applied Physics
E. Occhiello, F. Garbassi, et al.
Journal of Physics D: Applied Physics