J.W. Coburn, H.F. Winters
Nuclear Inst. and Methods in Physics Research, B
No abstract available.
J.W. Coburn, H.F. Winters
Nuclear Inst. and Methods in Physics Research, B
K. Kehler, J.W. Coburn, et al.
JVSTA
J.W. Coburn
Journal of Applied Physics
E. Occhiello, F. Garbassi, et al.
Plasma Chemistry and Plasma Processing