Hiroshi Ito, Bernd Giese, et al.
Macromolecules
Paper
Preparation of lithographic resist materials by anionic polymerization
Related
Conference paper
Hybrid Resist Systems Based on a-Substituted Acrylate Copolymers
Hiroshi Ito, Linda K. Sundberg, et al.
SPIE Advanced Lithography 2009
Conference paper
Vinyl ether resist system for UV-cured nanoimprint lithography
Hiroshi Ito, Frances A. Houle, et al.
SPIE Advanced Lithography 2006
Oun-Ho Park, Joy Y. Cheng, et al.
Advanced Materials