V. Narayanan, V.K. Paruchuri, et al.
VLSI Technology 2006
Paper
Prospects for high-resolution electron energy-loss experiments with the scanning transmission electron microscope
Abstract
A brief description of a Wien filter energy-loss spectrometer design for the STEM is given. The performance limit of the device is about 80 meV resolution at 1 mrad semi-angle. At a 12.5 mrad semi-angle referred to the specimen, the total system delivers 0.35 eV resolution, limited mainly by the field emission tunneling width. Various experimental results are compared to results from other spectrometers. © 1985.
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