Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We have used photoluminescence from nonequilibrium electrons recombining at neutral acceptors to quantitatively measure hot electron kinetics in GaAs. Values have been obtained for intervalley scattering rates as a function of electron kinetic energy and the scattering rate of a single nonequilibrium electron in the presence of a sea of thermalized carriers. These measurements demonstrate the power of this new probe of nonequilibrium carrier relaxation in direct gap semiconductors. © 1989.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.V. Harzer, B. Hillebrands, et al.
Journal of Magnetism and Magnetic Materials
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films