Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.