T.-C. Shen, Ph. Avouris
Surface Science
We report on the low-temperature reaction of ammonia with Si(100)-(2×1). The dangling bonds in the clean Si surface promote NH3 dissociation even at temperatures as low as 90 K. The N atoms thus produced occupy subsurface sites, while the H atoms bind to surface Si atoms, tie up the dangling bonds, and inactivate the surface. Thermal or electronic-excitation- induced hydrogen desorption restores the dangling bonds and the reactivity of the surface. Silicon nitride film growth is achieved at 90 K by simultaneous exposure of the Si surface to NH3 and an electron beam. © 1986 The American Physical Society.
T.-C. Shen, Ph. Avouris
Surface Science
Ph. Avouris, J.E. Demuth
The Journal of Chemical Physics
Ph. Avouris, J. Chen, et al.
IWEPNM 2006
M. Radosavljević, J. Appenzeller, et al.
Applied Physics Letters