William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
J.H. Stathis, R. Bolam, et al.
INFOS 2005
G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures