George A. Sai-Halasz, Matthew R. Wordeman, et al.
IEEE Electron Device Letters
A near-field capacitance microscope has been demonstrated on a 25 nm scale. A resonant circuit provides the means for sensing the capacitance variations between a sub-100-nm tip and surface with a sensitivity of 1×10 -19 F in a 1 kHz bandwidth. Feedback control is used to scan the tip at constant gap across a sample, providing a means of noncontact surface profiling. Images of conducting and nonconducting structures are presented.
George A. Sai-Halasz, Matthew R. Wordeman, et al.
IEEE Electron Device Letters
Y. Taur, Y. Mii, et al.
IBM J. Res. Dev
E. Babich, S. Rishton, et al.
American Chemical Society, Polymer Preprints, Division of Polymer Chemistry
S.J. Wind, Y. Taur, et al.
MRS Spring Meeting 1995