H. Rohrer, Ch. Gerber
Physical Review Letters
We have developed a small scanning tunneling microscope (STM) to be incorporated into a scanning electron microscope (SEM). Vibration isolation and damping is achieved solely with Viton dampers. As a stand-alone unit, a tunnel-gap stability of about 1 Å is reached at atmospheric air pressure without additional sound protection. Stability improves by at least an order of magnitude when incorporated into a SEM.
H. Rohrer, Ch. Gerber
Physical Review Letters
P. Vettiger, G. Gross, et al.
APMRC 2000
G. Binnig, H. Fuchs, et al.
Surface Science
M. Despont, J. Brugger, et al.
MEMS 1999