Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Scanning tunneling microscopy of Sn overlayers on the GaAs(110) surface shows patterns with local order of nominal (3×3) periodicity and an absence of long-range order. Using first-principles calculations, we show that these observations can be explained in terms of a double-layer structure which consists of a complete (1×1) Sn layer covered by Sn adatoms. This structure results from a subtle balance between electronic energy and lattice strain. Spectroscopic studies indicate that this Sn overlayer exhibits a narrow gap (<0.2 eV) centered in the gap region of the GaAs substrate. © 1989 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Gregory Czap, Kyungju Noh, et al.
APS Global Physics Summit 2025
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990