A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
A new precursor compound for the deposition of copper oxide thin films under molecular beam conditions, copper bis(benzoylacetone)-ethylenediimine, has been characterized by thermal analysis and in situ mass spectrometry. Its stability and decomposition behavior are reported as well as its use for the deposition of epitaxial copper oxide thin films on MgO. © 1996 American Vacuum Society.
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990