Secondary defect formation in bonded silicon-on-insulator after boron implantation

<svg focusable="false" preserveAspectRatio="xMidYMid meet" xmlns="http://www.w3.org/2000/svg" fill="currentColor" width="16" height="16" viewBox="0 0 16 16" aria-hidden="true" class="bx--accordion__arrow"> Focus areas

<svg focusable="false" preserveAspectRatio="xMidYMid meet" xmlns="http://www.w3.org/2000/svg" fill="currentColor" width="16" height="16" viewBox="0 0 16 16" aria-hidden="true" class="bx--accordion__arrow"> Quick links

<svg focusable="false" preserveAspectRatio="xMidYMid meet" xmlns="http://www.w3.org/2000/svg" fill="currentColor" width="16" height="16" viewBox="0 0 16 16" aria-hidden="true" class="bx--accordion__arrow"> Work with us

<svg focusable="false" preserveAspectRatio="xMidYMid meet" xmlns="http://www.w3.org/2000/svg" fill="currentColor" width="16" height="16" viewBox="0 0 16 16" aria-hidden="true" class="bx--accordion__arrow"> Directories

<svg focusable="false" preserveAspectRatio="xMidYMid meet" xmlns="http://www.w3.org/2000/svg" fill="currentColor" width="16" height="16" viewBox="0 0 16 16" aria-hidden="true" class="bx--accordion__arrow"> Follow us