PublicationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer StructuresPaperSecondary defect formation in bonded silicon-on-insulator after boron implantationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer StructuresView publicationAbstractNo abstract available.Home↳ PublicationsDate04 Feb 2004PublicationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer StructuresAuthorsA.F. SaavedraA.C. KingK.S. JonesE.C. JonesK.K. ChanIBM-affiliated at time of publicationTopicsPhysical SciencesShare
