PaperExtended x-ray absorption fine structure studies by soft x-ray fluorescence detectionF. Sette, S.J. Pearton, et al.Physica Scripta
PaperInductively coupled plasma etching of CoFeB, CoZr, CoSm and FeMn thin films in interhalogen mixturesH. Cho, K.B. Jung, et al.Materials Science and Engineering B: Solid-State Materials for Advanced Technology
Conference paperRelative merits of [formula omitted] and [formula omitted] plasma chemistries for dry etching of magnetic random access memory device elementsK.B. Jung, H. Cho, et al.Journal of Applied Physics
PaperHigh density plasma etching of NiFe, NiFeCo and NiMnSb-based multilayers for magnetic storage elementsK.B. Jung, J. Hong, et al.Applied Surface Science
