P.G. May, Y. Pastol, et al.
IBM J. Res. Dev
Silicon Mach-Zehnder waveguide modulators have been fabricated and operation characterized at the wavelength of 1.3 μm. Device operation is based on the free-carrier-induced change in the refractive index of silicon. Modulation depths of -4.9 dB and response times τresponse<50 ns have been achieved at λ=1.3 μm for an injected carrier density of 6.5×1017 cm-3.
P.G. May, Y. Pastol, et al.
IBM J. Res. Dev
V.P. Kesan, P.G. May, et al.
Journal of Crystal Growth
P.G. May, J.-M. Halbout, et al.
Advances in Semiconductors and Semiconductor Structures 1987
J.-M. Halbout, P.G. May, et al.
Advances in Semiconductors and Semiconductor Structures 1987