Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We have measured the temperature and magnetic field dependence of the low temperature resistivity of Au wires with dilute (∼50 ppm) Fe impurities as a function of wire width. In contrast to previous experiments, we find an increase in slope of the temperature dependent resistivity Δρ{variant}(T) as the wire width is decreased. A systematic trend is also evident in the field dependent resistivity Δρ{variant}(H). We also find an unusual scaling relation between Δρ{variant}(T) and Δρ{variant}(H) in our wider samples. © 1994.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
R.W. Gammon, E. Courtens, et al.
Physical Review B
P. Alnot, D.J. Auerbach, et al.
Surface Science
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering