Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Very recent results on the structural and electronic properties of small silicon clusters and endohedral metallofullerenes are presented, which have been obtained with ab-initio molecular dynamics Car-Parrinello calculations. They are compared with other theoretical approaches as well as with experimental data, whenever available. © 1993.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
T.N. Morgan
Semiconductor Science and Technology
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Physical Review B
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Micro and Nano Engineering