Jakub Kedzierski, Diane Boyd, et al.
IEDM 2003
Jakub Kedzierski, Diane Boyd, et al.
IEDM 2003
Kasra Sardashti, Evgueni Chagarov, et al.
ACS AMI
Daeyoung Lim, Richard Haight
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Shu-Jen Han, Alberto Valdes-Garcia, et al.
IEDM 2011