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Modeling polarization for Hyper-NA lithography tools and masks
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The Gouy-Chapman profile and linearized Poisson-Boltzmann pair correlation function are found to be self-consistent solutions to the Ornstein-Zernike equation coupled with the Lovett et al., Lebowitz-Percus, and Blum et al. sum rules. © 1987 Taylor & Francis Ltd.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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