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SPIE Advanced Lithography 2008
No abstract available.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
M. Hargrove, S.W. Crowder, et al.
IEDM 1998