Conference paper
Multilayer mirrors as x-ray filters for slit scan radiography
Robert S. Nelson, Zoran L. Barbaric, et al.
Proceedings of SPIE 1989
We point out the advantages of the use of x-ray resist as the recording medium in contact x-ray micrography, with subsequent viewing under the scanning electron microscope. Untreated specimens may be replicated with a resolution better than 100 nm. Photographs of latex spheres obtained by this technique are presented.
Robert S. Nelson, Zoran L. Barbaric, et al.
Proceedings of SPIE 1989
Eberhard Spiller, Daniel Stearns, et al.
Journal of Applied Physics
Eberhard Spiller, Leon Golub
Applied Optics
Eberhard Spiller, Armin Segmüller, et al.
Applied Physics Letters