M. Soyuer, J.N. Burghartz, et al.
BCTM 1996
Conference paper
SPIRIT - A bipolar/BiCMOS isolation technology for high-performance VLSI
Abstract
No abstract available.
Related
Conference paper
APCVD-grown self-aligned SiGe-base HBTs
J.N. Burghartz, T.O. Sedgwick, et al.
BCTM 1993
X. Liu, A. Petrou, et al.
Journal of Applied Physics
J.H. Comfort, G.L. Patton, et al.
IEDM 1990