Mark W. Dowley
Solid State Communications
Paper
Stability of molded polydime thylsiloxane microstructures
Related
Dipanjan Gope, Albert E. Ruehli, et al.
IEEE T-MTT
Fernando Marianno, Wang Zhou, et al.
INFORMS 2021
Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007