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This paper introduces stabilization techniques for intrinsically unstable, high accuracy rational approximation methods for strongly continuous semigroup. The methods not only stabilize the approximations, but improve their speed of convergence by a magnitude of up to 1/2. © 2007 Elsevier Inc. All rights reserved.
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
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