Z.H. Ming, Y.L. Soo, et al.
Applied Physics Letters
We report on strain and stability measurements on pseudomorphic Si 1-yCy/Si1-xGex superlattices which are synthesized by solid source molecular beam epitaxy on silicon (100) substrate. The strain in the superlattices alternates between tensile and compressive in the individual Si1-yCy and Si 1-xGex alloy layers, respectively. A symmetrical strain distribution can be achieved directly on silicon by adjusting the carbon and the germanium content and/or the thickness of the individual layers. X-ray diffraction and transmission electron microscopy are applied to investigate the structural properties and the thermal stability.
Z.H. Ming, Y.L. Soo, et al.
Applied Physics Letters
L.J. Schowalter, J.R. Jimenez, et al.
Journal of Crystal Growth
P.M. Mooney, F. Legoues, et al.
Applied Physics Letters
Subramanian S. Iyer, S.L. Delage, et al.
Applied Physics Letters