E.T. Yu, J.-M. Halbout, et al.
Applied Physics Letters
We report on strain and stability measurements on pseudomorphic Si 1-yCy/Si1-xGex superlattices which are synthesized by solid source molecular beam epitaxy on silicon (100) substrate. The strain in the superlattices alternates between tensile and compressive in the individual Si1-yCy and Si 1-xGex alloy layers, respectively. A symmetrical strain distribution can be achieved directly on silicon by adjusting the carbon and the germanium content and/or the thickness of the individual layers. X-ray diffraction and transmission electron microscopy are applied to investigate the structural properties and the thermal stability.
E.T. Yu, J.-M. Halbout, et al.
Applied Physics Letters
V.P. Kesan, P.G. May, et al.
IEDM 1990
R. Ghez, Subramanian S. Iyer
IBM J. Res. Dev
T.L. Lin, S.C. Chen, et al.
Applied Physics Letters