E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
No abstract available.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Lawrence Suchow, Norman R. Stemple
JES
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
J. Tersoff
Applied Surface Science