Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Guo-Jun Qi, Charu Aggarwal, et al.
IEEE TPAMI
Hang-Yip Liu, Steffen Schulze, et al.
Proceedings of SPIE - The International Society for Optical Engineering