J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
No abstract available.
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
Hiroshi Ito, Reinhold Schwalm
JES
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering