Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Paper
Summary abstract: Properties of hydrocarbon polymer films containing metal clusters
Abstract
No abstract available.
Related
G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
Paper
The DX centre
T.N. Morgan
Semiconductor Science and Technology