Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
No abstract available.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
T.N. Morgan
Semiconductor Science and Technology