William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
John G. Long, Peter C. Searson, et al.
JES
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
Kenneth R. Carter, Robert D. Miller, et al.
Macromolecules