J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
A chemical beam epitaxy system comprising low temperature effusion cells and a source of atomic oxygen has been developed for the preparation of cuprate thin films. Superconducting, smooth and single phase c-axis La2-xBaxCuO4 thin films have been grown using Cu(piv)2, La(piv)3 and Ba(thd)2 metallorganic precursors, demonstrating the viability of this inexpensive technique. © 1994.
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
A. Krol, C.J. Sher, et al.
Surface Science
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films