Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
An overview of surface and interface analysis within IBM is presented. The types of materials concerned; the areas in which surface analysis is having major impact; and the relative importance of different analytical techniques are discussed, together with perspectives for the future. Selected examples from Research Division work are presented to illustrate the range of materials work and techniques involved. © 1986 Springer-Verlag.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications
Lawrence Suchow, Norman R. Stemple
JES